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SIMS21, Poland 2017 - Jean-Paul Barnes abstract

Jean-Paul Barnes oral presentation (RM-Thu2-2-1)

Combining TOF-SIMS with X-ray computed nanotomography or AFM : fusion of morphological and hyperspectral datasets for nanoelectronic and energy applications.

Jean-Paul Barnes1, Agnieszka Priebe1, Gael Goret1, Guillaume Audoit1, Maiglid-Andreina Moreno Villavicencio1, Isabelle Mouton1, Nicolas Chevalier1, Jerome Laurencin2, Arnaud Bordes2, Eric De Vito2, Pierre Bleuet1, Brice Gautier3

1 University Grenoble Alpes - CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
2 University Grenoble Alpes - CEA, LITEN, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
3 Institut des Nanotechnologies de Lyon, INSA de Lyon, Université de Lyon, UMR CNRS 5270, 7, avenue Capelle, 69621 Villeurbanne, France

Modern dual-beam TOF-SIMS instruments can acquire 3-D data sets over a wide range of length scales. However, the analysis of samples containing several materials with different sputter rates leads to errors in the depth scale. One approach to correct such data sets is to acquire AFM images at strategic points in the depth profile and use this information to correct the TOF-SIMS depth scale. This approach has been used to correct the 3-D data sets of GaAs grown by selective epitaxy on silicon substrates. Performing AFM on these samples is particularly important as neither the initial surface nor the substrate are flat.

For larger volumes, several tens of microns in size, especially when the sample is very heterogeneous or porous, the depth-scale information is hard to retrieve from standard depth profiling. In this case FIB-TOF-SIMS tomography may be used. We have developed a sample preparation method to enable the same sample to be analysed first by X-ray computed nanotomography and then by FIB-TOF-SIMS tomography. The correlation of X-ray absorption and mass spectrometry data from the same sample can be used to help interpret the dataset and improve quantification. Results on copper pillars used in 3-D integration in nanoelectronics will be shown as well as analysis of solid oxide fuel cells (SOFCs) and electrodes for lithium batteries.

[1] A. Priebe et al. Ultramicroscopy. 173 (2017):10-13. [2] A. Priebe et al. J. of Microscopy 264(2) (2016) 247-251. [3] Work performed on the CEA Grenoble nanocharacterisation platform, funded by the CARNOT ATRIµM and EU H2020 research and innovation program METRO4-3D projects (Grant agreement No. 688225).