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SIMS21, Poland 2017 - Piotr Konarski abstract

Piotr Konarski oral presentation (SN1-Fri2-2-3)

‘Storing Matter’ technique applied for SIMS depth profiling

Maciej Miśnik1,2, Aleksander Zawada1,3, Piotr Konarski1

1 Insitute of Tele and Radio Technology, Ratuszowa 11, 03-450 Warszawa, Poland
2 Faculty of Technical Physics and Applied Mathematics - Gdansk University of Technology, Narutowicza 11/12, 80-233 Gdansk, Poland
3 Military University of Technology, Kaliskiego 2, 00-908 Warszawa, Poland


We present application of 'Storing Matter' technique for SIMS depth profiling analyses. This technique allows for the analysis of a given sample by depositing sputtered material through a special diaphragm onto a rotating collector [1]. The material stored on this collector is then analysed by SIMS in the same vacuum chamber and with the use of the same ion beam that is used for the sputter deposition process [2]. Thus, this technique allows for the separation of the ion sputtering ionization processes.

For the presented experiments we used the Physical Electronics 06-350E ion gun generating 5 keV Ar+ 500 nA ion beam. As a mass spectrometer we used QMA-410 Balzers quadrupole, and titanium discs covered with titanium and molybdenum oxides were used as collectors [3].

With the ‘Storing Matter’ technique we analysed several vacuum deposited structures, mainly transition metal thin films. We aim at determining optimal conditions for the use of this technique for depth profile analyses. To this end, we test various parameters, such as as ion beam scanning range, sputtering rate, shape and dimension of the diaphragm and others.

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[1] Wirtz, T., & Migeon, H. N. (2008). Storing Matter: A new quantitative and sensitive analytical technique. Applied Surface Science, 255(4), 1498-1500.

[2] Konarski, P., Miśnik, M., Zawada, A., & Brongersma, H. H. (2014). Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser. Surface and Interface Analysis, 46(S1), 360-363.

[3] Miśnik, M., Konarski, P., & Zawada, A. (2016). Metal oxide collectors for storing matter technique applied in secondary ion mass spectrometry. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 371, 199-204.